Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Plasma generating
Patent
1996-02-15
1997-05-06
Pascal, Robert
Electric lamp and discharge devices: systems
Discharge device load with fluent material supply to the...
Plasma generating
31511141, 118723R, 118723MA, 156345, 216 71, H01P 512
Patent
active
056274351
ABSTRACT:
An array of hollow cathodes can be made by mounting a housing connected to a source of plasma precursor gas and to a source of power in a vacuum chamber, said housing having a plurality of uniformly spaced openings in a wall thereof into which a plasma can be generated. A substrate to be treated is mounted parallel to and spaced a preselected distance from said openings. In operation, a plurality of plasma torches is created extending from the openings which can plasma etch and remove coatings on said substrate.
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Belkind Abraham I.
Jansen Frank
Krommenhoek Steven K.
Orban, Jr. Zoltan
Draegert David A.
Gambino Darius
Pace Salvatore P.
Pascal Robert
The BOC Group Inc.
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