Holding mechanism, and exposure apparatus using the mechanism

Details Holding mechanism, and exposure apparatus using the mechanism Holding mechanism, and exposure apparatus using the mechanism

1997-01-31

1999-12-21

Porta, David P.

X-ray or gamma ray systems or devices

Specific application

Lithography

378208, G03F 720

Patent

active

060059109

ABSTRACT:
A holding mechanism includes a box body for providing a space for accommodating an X-ray mask, at least one opening formed at the side of the box body and a holding mechanism for holding the X-ray mask within the space by a kinematic mount system.

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D.L. Laird, et al., "Practical Considerations in X-Ray Mask Mounting Methodology", J. Vacuum Sci. & Tech., Part B, vol. 11, No. 6, Nov. 1993, pp. 2953-2957, Throfare, NJ.

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