Holding device for an optical element with support force...

Details Holding device for an optical element with support force... Holding device for an optical element with support force...

2007-08-17

2009-10-27

Dang, Hung X (Department: 2873)

Optical: systems and elements

Lens

With support

C359S811000, C359S822000

Reexamination Certificate

active

07609464

ABSTRACT:
Holding devices for optical elements, as well as related modules, systems and methods are disclosed. The devices, modules, systems and methods may, for example, be used in the context of microlithography used in manufacturing microelectronic circuits.

REFERENCES:
patent: 4733945 (1988-03-01), Bacich
patent: 6392825 (2002-05-01), Trunz et al.
patent: 6825998 (2004-11-01), Yoshida
patent: 7486382 (2009-02-01), Back et al.
patent: 2004/0257679 (2004-12-01), Sudoh

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