HMDS supplying apparatus

Details HMDS supplying apparatus HMDS supplying apparatus

1996-12-24

1999-06-29

Bueker, Richard

Coating processes

Measuring, testing, or indicating

4272481, 118691, 118708, 118712, 118715, 73305, 73307, C23C 1600

Patent

active

059166266

ABSTRACT:
An HMDS supplying apparatus capable of sensing the flow of hexamethyldisilazane through a flowmeter and to control the amount thereof which is flowing, to thereby prevent a lowering of productivity due to inadequate or excessive flow amounts. The HMDS supplying apparatus includes a carrier gas supplier for supplying a carrier gas for HMDS; a container connected to the carrier gas supplier adapted for containing HMDS therein; a flowmeter for controlling the amount of flowing HMDS supplied together with the carrier gas from the container; and an HMDS processor for depositing HMDS supplied via the flowmeter on the surface of a wafer; wherein the apparatus further includes: an indicator for indicating the level of HMDS in the flowmeter; and an optical sensing device having an optical source and an optical sensor, for controlling the flow of HMDS by sensing whether the indicator is located at an optimum position.

REFERENCES:
patent: 5501739 (1996-03-01), Yamada

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