Hinge design for enhanced optical performance for a...

Optical: systems and elements – Optical modulator – Light wave temporal modulation

Reexamination Certificate

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C359S290000, C359S223100, C359S224200, C359S214100

Reexamination Certificate

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10741921

ABSTRACT:
An apparatus for use with a digital micro-mirror includes a hinge disposed outwardly from a substrate. The hinge is capable of at least partially supporting a micro-mirror disposed outwardly from the hinge. The micro-mirror is capable of being selectively transitioned between an on-state position and an off-state position. In one particular embodiment, the hinge comprises a substantially flat profile for at least a portion of the hinge disposed between a first hinge post of the hinge and a mid-point of the hinge. The apparatus also includes a plurality of process control voids formed within a conductive layer disposed inwardly from the hinge. In one particular embodiment, the substantially flat profile is at least partially created from the plurality of process control voids.

REFERENCES:
patent: 6257491 (2001-07-01), Tan et al.
patent: 2003/0117688 (2003-06-01), Meier et al.
patent: 2004/0165249 (2004-08-01), Aubuchon

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