Highly sensitive vacuum ion pump current measurement system

Radiant energy – Ionic separation or analysis – With evacuation or sealing means

Reexamination Certificate

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Details

C073S471000, C073S735000

Reexamination Certificate

active

07002147

ABSTRACT:
A vacuum system comprising: 1) an ion pump; 2) power supply; 3) a high voltage DC—DC converter drawing power from the power supply and powering the vacuum pump; 4) a feedback network comprising an ammeter circuit including an operational amplifier and a series of relay controlled scaling resistors of different resistance for detecting circuit feedback; 5) an optional power block section intermediate the power supply and the high voltage DC—DC converter; and 6) a microprocessor receiving feedback information from the feedback network, controlling which of the scaling resistors should be in the circuit and manipulating data from the feedback network to provide accurate vacuum measurement to an operator.

REFERENCES:
patent: 4835479 (1989-05-01), Haines

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