4. Radiant energy
  5. Irradiation of objects or material
  6. Irradiation of semiconductor devices

James J. Leyvourne

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Highly sensitive vacuum ion pump current measurement system

Radiant energy – Ionic separation or analysis – With evacuation or sealing means
Reexamination Certificate

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Load lock vacuum conductance limiting aperture

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2766376

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