Highly sensitive accelerometer

Details Highly sensitive accelerometer Highly sensitive accelerometer

2007-07-17

2007-07-17

Kwok, Helen (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

C250S227140, C250S227180, C356S477000

Reexamination Certificate

active

11018944

ABSTRACT:
Accelerometers for determining acceleration and methods of fabricating an accelerometer are disclosed. In one embodiment, the accelerometer includes a frame, a mass movably suspended on the frame, a fixed element having a rounded surface that does not move with respect to the frame, a movable element having a rounded surface that moves with the mass, and a sensing coil of optical waveguide wrapped around the rounded surfaces to detect movement of the mass in response to acceleration based on interferometric sensing of a change in length of the sensing coil. A method of fabricating the accelerometer includes suspending the mass in the frame and wrapping the optical waveguide around the rounded surfaces. Sensitivity and low fabrication cost of the accelerometers enables their use for integration within an ocean bottom seismic cable. Further, the accelerometer may be an in-line or a cross-line accelerometer depending on the arrangement within the frame.

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