Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent
1993-08-20
1994-11-15
Powell, William
Adhesive bonding and miscellaneous chemical manufacture
Delaminating processes adapted for specified product
Delaminating in preparation for post processing recycling step
156657, 156345, H01L 21306, B44C 122
Patent
active
053644964
ABSTRACT:
A support and positioning apparatus (10) for supporting and positioning a wafer (12), substrate or the like in a plasma assisted chemical etching process. Surround components (14, 16, 18, 20) positioned around the substrate (12) are comprised of substantially pure magnesium or are aluminum coated with a magnesium fluoride coating such that as a plasma tool associated with the plasma etching process traverses the edge of the substrate (12), the plasma etching environment generated from a fluorine containing feed gas emitted from the plasma tool does not significantly erode the surround components (14, 16, 18, 20) or cause contamination of the substrate (12).
REFERENCES:
patent: 4400235 (1983-08-01), Coquin et al.
patent: 4419201 (1983-12-01), Levinstein et al.
patent: 4473455 (1984-09-01), Dean et al.
patent: 4668366 (1987-05-01), Zarowin
patent: 5268200 (1993-12-01), Steger
Bollinger Lynn D.
Gardopee George J.
Poole Richard R.
Power Michael P.
Denson-Low Wanda K.
Hughes Aircraft Company
Powell William
Sales Michael W.
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