Electrical connectors – Metallic connector or contact having movable or resilient... – Spring actuated or resilient securing part
Patent
1992-08-14
1994-09-20
Abrams, Neil
Electrical connectors
Metallic connector or contact having movable or resilient...
Spring actuated or resilient securing part
411373, H01R 1324
Patent
active
053484975
ABSTRACT:
A high voltage contact assembly comprising two dielectric housing members adapted for fastening together, the first dielectric housing member having a first conductor inserted therein, the second dielectric housing member having a second conductor inserted therein and spring means sandwiched between the first conductor and the second conductor, the second conductor fastened to a high voltage cable member, such that, when the dielectric housing members are fastened together, the first conductor member extends above the surface of the first housing member. The contact assembly of the invention is useful for mounting in a base plate support for an electrostatic chuck in an etch chamber.
REFERENCES:
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patent: 4487661 (1984-12-01), Barraud et al.
patent: 4703986 (1987-11-01), McCormick
patent: 4842683 (1989-06-01), Cheng et al.
Bulletin Servometer Corp for Gold Plated Bellows Contact Springs, 2 pp.
Belleville Spring Washer brochure.
Abrams Neil
Applied Materials Inc.
Morris Birgit E.
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