High voltage semiconductor device and method for fabricating...

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

Reexamination Certificate

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C257S333000, C257S330000, C438S151000

Reexamination Certificate

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07573100

ABSTRACT:
There is provided a high voltage semiconductor device comprising: a semiconductor substrate of a first conductivity type, including a first region, a second region relatively lower than the first region, and a sloped region between the first region and the second region; a drift region of a second conductivity type, formed on the second region; a source region of the second conductivity type, disposed on the first region, and spaced apart from the drift region by the sloped region; a drain region of the second conductivity type, disposed on the drift region; a field plate positioned on the drift region in the second region; a gate insulating layer disposed between the source region and the drift region; and a gate electrode layer, which is disposed on the gate insulating layer and extends to above the field plate.

REFERENCES:
patent: 6232636 (2001-05-01), Simpson et al.
patent: 7064385 (2006-06-01), Dudek et al.
patent: 7187033 (2007-03-01), Pendharkar
patent: 7224025 (2007-05-01), Tsai et al.
patent: 7247507 (2007-07-01), Sung
patent: 2005/0001265 (2005-01-01), Shiraki et al.
patent: 2006/0148110 (2006-07-01), Sung

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