High time resolution electron microscope

Details High time resolution electron microscope High time resolution electron microscope

1986-12-15

1988-08-16

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

250310, 250397, H01J 37285

Patent

active

047646748

ABSTRACT:
A high time resolution electron microscope unit comprising a beam source for generating an exciting beam; a microscope for exposing the surface of a specimen to be observed to the exciting beam for emitting electrons from the surface; an image formation device for receiving the emitted electrons and for displaying an image representative of variations in the surface of the specimen; a gate mechanism for controlling the flow of emitted electrons from the specimen toward the image formation device; deflecting plates for deflecting the emitted electrons from the gate mechanism onto the image formation device; and a drive circuit for synchronizing the operation of the gate mechanism, the deflecting coil and the beam source.

REFERENCES:
patent: 2267137 (1941-12-01), Ruska et al.
patent: 4096386 (1978-06-01), Rempfer et al.

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