High throughput servo load cup with integrated wet chemistry...

Details High throughput servo load cup with integrated wet chemistry... High throughput servo load cup with integrated wet chemistry...

2007-03-30

2010-10-12

Eley, Timothy V (Department: 3724)

Abrading

Precision device or process - or with condition responsive...

With indicating

C451S339000, C414S749100

Reexamination Certificate

active

07811153

ABSTRACT:
A work piece handling apparatus moves workpieces with a plurality of independently movable load cups that have combined multiple axes of motion. The apparatus can load and unload work pieces from a wet process station and move work pieces between wet process stations and maintain wet chemistry delivery to the workpiece without involving a robot. A method of work piece handling using the apparatus provides a significant throughput improvement by reducing the inherent time lag of pneumatic systems and eliminating multiple steps involving the robot during inter-station wafer transfer.

REFERENCES:
patent: 6402598 (2002-06-01), Ahn et al.
patent: 6435941 (2002-08-01), White
patent: 6488565 (2002-12-01), White et al.
patent: 6852007 (2005-02-01), Gonzalez-Martin et al.
patent: 7229339 (2007-06-01), Stumpf et al.
patent: 7241203 (2007-07-01), Chen et al.
patent: 7335092 (2008-02-01), Severson et al.
patent: 7354335 (2008-04-01), Marquardt et al.
patent: 7367866 (2008-05-01), Jeong
patent: 2005/0202677 (2005-09-01), Hsu et al.
patent: 2005/0227595 (2005-10-01), Marquardt et al.
patent: 2006/0003671 (2006-01-01), Stumpf et al.
patent: 2007/0281589 (2007-12-01), Oh et al.
Novellus GAMMA 2130 Atmospheric Robot (Comparison between Current Design and New Direct Drive Design), Novellus Robotics Engineering, Aug. 16, 2005, 7 pages.

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