High throughput processes and systems for barrier film...

Details High throughput processes and systems for barrier film... High throughput processes and systems for barrier film...

2011-07-12

2011-07-12

Deo, Duy-Vu N (Department: 1713)

Coating processes

Direct application of electrical, magnetic, wave, or...

Plasma

C427S575000, C427S582000, C118S7230MP

Reexamination Certificate

active

07976908

ABSTRACT:
Processes for simultaneously encapsulating multiple optoelectronic devices and/or depositing a barrier film onto multiple substrates suitable for fabrication of optoelectronic devices thereon include the use of a plasma deposition apparatus having multiple pairs of opposing electrodes for deposition of reactants onto the substrate that is used to form the device or the complete device itself. The processes significantly reduce tact time relative to one at a time batch processing that is currently used for manufacturing optoelectronic devices.

REFERENCES:
patent: 4474659 (1984-10-01), Fazlin
patent: 4842941 (1989-06-01), Devins et al.
patent: 4887005 (1989-12-01), Rough et al.
patent: 4927704 (1990-05-01), Reed et al.
patent: 5156882 (1992-10-01), Rzad et al.
patent: 5260134 (1993-11-01), Hayashi et al.
patent: 7015640 (2006-03-01), Schaepkens et al.
patent: 2005/0224935 (2005-10-01), Schaepkens et al.
patent: 2007/0202640 (2007-08-01), Al-Bayati et al.
patent: 2007/0275181 (2007-11-01), Carcia et al.
patent: 2008/0138624 (2008-06-01), Lewis et al.
patent: 2008/0196664 (2008-08-01), David et al.
Lewis et al., “Thin-Film Permeation-Barrier Technology for Flexible Organic Light-Emitting Devices”, IEEE Journal of Selected Topics in Quantum Electronics, vol. 10, No. 1, Jan./Feb. 2004, pp. 45-57.
Lungenschmied et al., “Flexible Encapsulation for Organic Solar Cells” Photonics for Solar Energy Systems, Proc. of SPIE vol. 6197, pp. 1-8.

Affiliated with

Also associated with

Rating

High throughput processes and systems for barrier film... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with High throughput processes and systems for barrier film..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and High throughput processes and systems for barrier film... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2740056