High throughput multi beam detection system and method

Details High throughput multi beam detection system and method High throughput multi beam detection system and method

2007-12-19

2009-11-17

Pyo, Kevin (Department: 2878)

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

C356S237500

Reexamination Certificate

active

07619203

ABSTRACT:
A system and method for inspecting an article, the system includes a spatial filter that is shaped such as to direct output beams towards predefined locations and an optical beam directing entity, for directing the multiple output beams toward multiple detector arrays. The method includes spatially filtering multiple input light beams to provide substantially aberration free output light beams; and directing the multiple output beams by an optical beam directing entity, toward multiple detector arrays.

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