Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Patent
1996-08-07
2000-02-15
Nguyen, Kiet T.
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
25044211, 25044311, H01T 3726
Patent
active
060255927
ABSTRACT:
An environmental scanning electron microscope is provided which is capable of maintaining a specimen at a temperature up to approximately 1500.degree. C. In this environmental scanning electron microscope, a specimen chamber maintains the specimen enveloped in gas in registration with a final pressure limiting aperture of the objective lens assembly. The specimen chamber includes a specimen stage having a sample platform for supporting the specimen under examination at a first vertical height and a specimen heating assembly which includes a non-inductively wound heater coil which is positioned closely adjacent to the sample platform and extends to a second vertical height which is significantly above the first vertical height so that the top of the specimen is maintained at a high temperature. In this environmental scanning electron microscope, a heat shield assembly is positioned above the specimen heating assembly in the specimen chamber to avoid radiant heat loss and which has an adjustable bias voltage applied thereto to accelerate secondary electrons through its central opening to be collected by an electron detector. Moreover, in order to enhance image quality, the final pressure limiting aperture and the electron detector are biased at different voltages with the bias applied to the final pressure limiting aperture floated to provide for automatic compensation. A specimen stage moving assembly is also provided to move the specimen stage with respect to the heat shield assembly to enhance the field-of-view of the specimen.
REFERENCES:
patent: 3896314 (1975-07-01), Nukui et al.
patent: 3919558 (1975-11-01), Brouillette et al.
patent: 4789781 (1988-12-01), Kitagawa et al.
patent: 4823006 (1989-04-01), Danilatos et al.
patent: 4992662 (1991-02-01), Danilatos
patent: 5097134 (1992-03-01), Kimoto et al.
patent: 5362964 (1994-11-01), Knowles et al.
patent: 5396067 (1995-03-01), Suzuki et al.
patent: 5412211 (1995-05-01), Knowles et al.
patent: 5466936 (1995-11-01), Kohama et al.
Fulrath, "Scanning Electron Microscopy to 1600.degree.C", Scanning Electron Microscopy/1972 (Part I), Proc. of the Fifth Annual Scanning Electron Microscope Symposium, IIT Research Institute, Chicago, Ill., pp. 17-24 (Apr. 1972).
Hardt Thomas A.
Knowles W. Ralph
Nguyen Kiet T.
Philips Electronics North America
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