High-temperature resistant photoresists featuring maleimide bind

Details High-temperature resistant photoresists featuring maleimide bind High-temperature resistant photoresists featuring maleimide bind

1986-02-24

1987-05-05

Kittle, John E.

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Radiation sensitive composition or product or process of making

430190, 430192, 430326, 430325, 522166, G03C 1495, G03C 152, G03F 726

Patent

active

046632689

ABSTRACT:
There is disclosed a resist comprising a radiation-sensitive sensitizer that produces, with a binder, imagewise differential solubility when imagewise exposed. The resist is improved in that the binder has a rigid heterocyclic ring structure with the formula ##STR1##

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patent: 4524121 (1985-06-01), Gleim et al.
Bruce E. Babb et al., "Stable Photosensitive Triorganophosphine Aromatic Azide Complexes", No. 13459, Research Disclosure, Jun. 1975, pp. 51-53.

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