Electric resistance heating devices – Heating devices – Radiant heater
Reexamination Certificate
2007-06-12
2007-06-12
Robinson, Daniel (Department: 3742)
Electric resistance heating devices
Heating devices
Radiant heater
C118S725000
Reexamination Certificate
active
10654068
ABSTRACT:
A substrate to be processed in a high temperature processing chamber is preheated to avoid the problems associated with thermal shock when the substrate is dropped onto a heated susceptor. Preheating is effected by holding the substrate over a susceptor maintained at or near the processing temperature until the temperature of the substrate approaches the processing temperature. Thus, wafer warping and breakage are greatly reduced, and wafer throughput is improved because of time saved in maintaining the susceptor at constant temperature without cool down and reheat periods.
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Aggarwal Ravinder
Haro Robert C.
Jacobson Paul
Raaijmakers Ivo
ASM America Inc.
Knobbe Martens Olson & Bear LLP
Robinson Daniel
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