High stability bimorph scanning tunneling microscope

Details High stability bimorph scanning tunneling microscope High stability bimorph scanning tunneling microscope

1988-07-21

1990-01-16

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

2504421, H01J 3700

Patent

active

048945374

ABSTRACT:
A novel scanning tunneling microscope (STM) is described which is constructed almost entirely of one metal e.g. aluminum and uses bimorph piezoelectric disks as the x, y, z drive elements. The design uses a simple, rugged tirpod configuration for the fine motion drive arms. Coarse motion of the sample, which is mounted on an aluminum holder, is achieved by pushing, or pulling, with a piezoelectric louse. Differential thermal expansion effects are avoided by design, to first order, and the resulting drift is .ltoreq.0.5 .ANG. per minute after only a short warm-up period. It is easy to build and operate, and has good immunity to mechanical vibrations.

REFERENCES:
patent: 4520570 (1985-06-01), Bedmorz et al.
patent: 4762996 (1988-08-01), Binnig et al.
"Scanning Tunneling Microscopy Study of Metals: Spectroscopy and Topography", Kaiser et al., Surface Science, 181, 1987, pp. 55-67.
B. L. Blackford et al., Rev. Sci. Instrum. 58 (8), Aug. 1987, 1343-1348.
B. Drake et al., Rev. Sci. Instrum. 57 (3), Mar. 1986, 441-445.
G. Binnig et al., IBM J. Res. Develop., vol. 30, No. 4, 355-369, Jul. 1986.

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