Radiant energy – Inspection of solids or liquids by charged particles
Patent
1989-03-23
1991-05-28
Anderson, Bruce C.
Radiant energy
Inspection of solids or liquids by charged particles
G01N 2300
Patent
active
050197070
ABSTRACT:
Stroboscopic voltage measurements are effected within a short time window with very high spatial resolution using a tunneling microscope. Sampling the tunneling current is implemented by modulating the distance between the tunneling tip and a conductor which carries the waveform to be sampled. In one embodiment, the tunneling tip is mounted on a crystal oscillator to modulate the separation between the tunneling tip and the conductor. As an alternative, an acoustic modulator is used to produce mechanical motion in the surface of the sample in order to modulate the distance between the sample and the tunneling tip.
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Chiu George L.
Halbout Jean-Marc
Anderson Bruce C.
International Business Machines - Corporation
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