High-speed two-dimensional electrostatic actuator

Details High-speed two-dimensional electrostatic actuator High-speed two-dimensional electrostatic actuator

1990-07-26

1991-10-08

Stephan, Steven L.

Electrical generator or motor structure

Non-dynamoelectric

Charge accumulating

310 12, 318135, 361233, H02N 100, H02K 4102

Patent

active

050557319

ABSTRACT:
An electrostatic actuator includes a stationary element and a movable element. The stationary element has a surface which faces a surface of the moving element. Both the surface of the stationary element and the surface of the moving element have electrode lines disposed thereon, including a first set of parallel electrode lines and a second set of parallel electrode lines which are perpendicular to the lines in the first set. By facing the stationary surface and the movable surface towards each other such that the electrode lines of such surfaces are aligned, the movable element can be moved along either of two perpendicular axes when a voltage is applied to the electrode lines.

REFERENCES:
patent: 3668443 (1972-06-01), Schwartz
patent: 3851196 (1974-11-01), Hinds
patent: 4754185 (1988-06-01), Gabriel
patent: 4814657 (1989-03-01), Yano et al.

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