High-speed inspection of flat substrates with underlying...

Details High-speed inspection of flat substrates with underlying... High-speed inspection of flat substrates with underlying...

2005-03-29

2005-03-29

Wells, Nikita (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

C250S307000, C250S310000, C250S397000, C250S398000, C250S400000, C250S491100, C250S492300

Reexamination Certificate

active

06872942

ABSTRACT:
One embodiment disclosed relates to a method for inspecting a substrate. The method includes exposing the substrate to an incident beam, inducing relative motion between the incident beam and the substrate, and detecting charged particles emitted from the substrate. The relative motion is such that the beam travels over a surface of the substrate along a substantially spiral shaped path.

REFERENCES:
patent: 6465781 (2002-10-01), Nishimura et al.
patent: 6566897 (2003-05-01), Lo et al.
patent: 6618134 (2003-09-01), Vaez-Iravani et al.
patent: 6636302 (2003-10-01), Nikoonahad et al.
patent: 6673637 (2004-01-01), Wack et al.

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