Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate
2008-01-01
2008-01-01
Vanore, David (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
C250S306000, C250S307000, C250S397000
Reexamination Certificate
active
11031091
ABSTRACT:
One embodiment disclosed relates to an electron beam apparatus for inspection of a semiconductor wafer, wherein substantially an entire area of the wafer surface is scanned without moving the stage. A cathode ray tube (CRT) gun may be used to rapidly (and cost effectively) scan the beam over the wafer. Another embodiment disclosed relates to a high-speed automated e-beam inspector configured to scan the e-beam in one dimension while translating the wafer in a perpendicular direction. The translation may be linear, or alternatively, may be in a spiral path. Other embodiments are also disclosed.
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Stan Stokowski et al., “Wafer Inspection Technology Challenges for ULSI Manufacturing” KLA-Tencor, Milpitas, CA.
Stan Stokowski, et al. “Wafer inspection technology challenges for ULSI manufacturing”, 11 sheets, KLA-Tencor, Milpitas, California.
Adler David L.
Bertsche Kirk J.
Han Liqun
McCord Mark A.
Vaez-Iravani Mehdi
KLA-Tencor Technologies Corporation
Leybourne James J
Okamoto & Benedicto LLP
Vanore David
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