Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Patent
1998-01-12
2000-06-13
Nguyen, Kiet T.
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
H01J 3700
Patent
active
060752459
ABSTRACT:
A CRT gun is used to inspect substrates in a voltage contrast system. The CRT gun directs a beam of electrons at the substrate, which is at least partially disposed in a vacuum chamber. The vacuum chamber is evacuated and provided with an electron detector to sense secondary electron emission due to impingement of the electron stream on the substrate. In an alternative embodiment, a plurality of CRT guns are used in conjunction with a common vacuum chamber. The plural CRTs may share a common electron detector, or may each be provided with an associated electrostatically isolated detector. The system is preferably used to detect flat panel displays (FPDs) during manufacture.
REFERENCES:
patent: 3961190 (1976-06-01), Lukianoff et al.
patent: 4996590 (1991-02-01), Okamoto et al.
patent: 5834900 (1998-11-01), Tanaka et al.
Yakowitz, H., (1972) "The Cylindrical Secondary Electron Detector as a Voltage Measuring Device in the Scanning Electron Microscope," Scanning Electron Microscopy/1972 (Part 1) Proceedings of the Fifth Annual Scanning electron Microscope Symposium, ITT Research Institute, Chicago, IL, pp. 33-40.
LandOfFree
High speed electron beam based system for testing large area fla does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with High speed electron beam based system for testing large area fla, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and High speed electron beam based system for testing large area fla will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2070288