High sensitivity microelectromechanical sensor with rotary...

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect

Reexamination Certificate

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

C073S504120

Reexamination Certificate

active

08042394

ABSTRACT:
A driving mass of an integrated microelectromechanical structure is moved with a rotary motion about an axis of rotation, and a sensing mass is connected to the driving mass via elastic supporting elements so as to perform a detection movement in the presence of an external stress. The driving mass is anchored to an anchorage arranged along the axis of rotation by elastic anchorage elements. An opening is provided within the driving mass and the sensing mass is arranged within the opening. The elastic supporting and anchorage elements render the sensing mass fixed to the driving mass in the rotary motion, and substantially decoupled from the driving mass in the detection movement. The detection movement is a rotation about an axis lying in a plane. The sensing mass has, in plan view, a non-rectangular shape; in particular, the sensing mass has a radial geometry and, in plan view, the overall shape of a radial annulus sector.

REFERENCES:
patent: 5889207 (1999-03-01), Lutz
patent: 6062082 (2000-05-01), Guenther et al.
patent: 6189381 (2001-02-01), Huang et al.
patent: 6244111 (2001-06-01), Funk
patent: 6250157 (2001-06-01), Touge
patent: 6349597 (2002-02-01), Folkmer et al.
patent: 6374672 (2002-04-01), Abbink et al.
patent: 6513380 (2003-02-01), Reeds, III et al.
patent: 6626039 (2003-09-01), Adams et al.
patent: 6715352 (2004-04-01), Tracy
patent: 6837107 (2005-01-01), Geen
patent: 6894576 (2005-05-01), Giousouf et al.
patent: 6918298 (2005-07-01), Park
patent: 6952965 (2005-10-01), Kang et al.
patent: 7100446 (2006-09-01), Acar et al.
patent: 7258012 (2007-08-01), Xie
patent: 7677099 (2010-03-01), Nasiri et al.
patent: 7694563 (2010-04-01), Durante et al.
patent: 2002/0189354 (2002-12-01), Durante et al.
patent: 2007/0214883 (2007-09-01), Durante et al.
patent: 2009/0064780 (2009-03-01), Coronato et al.
patent: 2009/0100930 (2009-04-01), Coronato et al.
patent: 2010/0126269 (2010-05-01), Coronato et al.
patent: 2010/0126272 (2010-05-01), Coronato et al.
patent: 2010/0154541 (2010-06-01), Cazzaniga et al.
patent: 2010/0281977 (2010-11-01), Coronato et al.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

High sensitivity microelectromechanical sensor with rotary... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with High sensitivity microelectromechanical sensor with rotary..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and High sensitivity microelectromechanical sensor with rotary... will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-4298133

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.