High sensitivity micro-machined pressure sensors and acoustic tr

Details High sensitivity micro-machined pressure sensors and acoustic tr High sensitivity micro-machined pressure sensors and acoustic tr

1997-09-17

2000-01-11

Felber, Joseph L.

Measuring and testing

Fluid pressure gauge

Diaphragm

73632, G01L 912

Patent

active

060123354

ABSTRACT:
A method of making a pressure sensor or acoustic transducer having high sensitivity and reduced size. A thin sensing diaphragm is produced by growing a single crystal, highly doped silicon layer on a substrate using a chemical vapor deposition process. The diaphragm is incorporated into a pressure sensor or acoustic transducer which detects pressure variations by a change in the capacitance of a capacitor which includes the diaphragm as a movable member. The thin diaphragm produces a highly sensitive device which can be fabricated in a smaller size than sensors or transducers having thicker diaphragms.

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