Radiant energy – Electron energy analysis
Patent
1984-05-23
1985-12-17
Anderson, Bruce C.
Radiant energy
Electron energy analysis
250356R, 3133611, H01J 4948, H01J 4000
Patent
active
045594490
ABSTRACT:
A spectrometer for high-resolution particle energy loss spectroscopy is described. Specifically, the high-resolution particle energy loss spectrometer of the present invention comprises: source means for producing a collimated beam of particles; first stage monochromator means for selecting particles within a specified energy range; intermediate particle lens means for collimating, accelerating and decelerating the particles exiting from the first stage monochromator means; second stage monochromator means for selecting particles within a specified energy range; exit particle focusing means; input particle focusing means; cylindrical analyzer means for selecting particles with a specified energy range; and detector means for detecting impinging particles. The spectrometer described herein obtains higher system resolution at a given output current than other spectrometers known in the art.
REFERENCES:
patent: 3448263 (1969-06-01), Boutet et al.
patent: 3541328 (1970-11-01), Enge
patent: 4300045 (1981-11-01), Ibach
patent: 4412131 (1983-10-01), Froitzheim
"High Resolution Electron Loss Spectrometer ELS22", Leybold-Heraeus 64-600.2.
"A High Resolution Electron Energy Loss Spectrometer For Vibrational Surface Studies", Breet A. Sexton, J. Vac. Sci. Technol. 16, 1033 (1979), GMR-2920 Research Publication.
Anderson Bruce C.
Indiana University Foundation
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