Radiant energy – Inspection of solids or liquids by charged particles – Methods
Patent
1993-04-09
1996-02-13
Anderson, Bruce C.
Radiant energy
Inspection of solids or liquids by charged particles
Methods
H01J 3700
Patent
active
054913381
ABSTRACT:
Methods of high resolution imaging and measuring dynamic surface effects of substrate surfaces is provided. The present invention utilizes electronic scanning with multiple scanning tunneling microscope (STM) tunnel-effect probes on an array that is stationary relative to the substrate surface. A high resolution image of the substrate surface is obtained by positioning an array of STM probes stationary relative to the substrate surface during the scanning process, selecting spatial points at which probes of the array of STM probes are to be activated, selecting times at which the selected STM probes are to be activated, activating the selected STM probes at the selected times, and measuring tunneling currents between the selected STM probes and the substrate.
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