High resolution imagery systems and methods

Details High resolution imagery systems and methods High resolution imagery systems and methods

1992-06-11

1995-01-31

Sugarman, Scott J.

Optical: systems and elements

Diffraction

From grating

359742, 359565, 359569, 359573, G02B 518

Patent

active

053863194

ABSTRACT:
The current limits of resolution of multi-element optical systems are exceeded by reducing the number of elements while introducing at the critical aperture a blazed transmission grating having grating rings of low bending power defined by multiple plateaus. By illuminating the optical train with monochromatic light that constitutes a multiplicity of distributed sources having a substantial temporal coherence but spatial incoherence and by varying the slopes and widths of the grating rings, local phase delays are introduced that adjust aberrations in the optical system, providing an aligned composite wavefront. The system and method may be used for presenting an image, as for a wafer stepper, or for viewing an image, as in a microscope.

REFERENCES:
patent: 4690506 (1987-09-01), Kita et al.
patent: 4895790 (1990-01-01), Swanson et al.
patent: 5073007 (1991-12-01), Kedmi et al.
patent: 5151826 (1992-09-01), Pasco
patent: 5161059 (1989-08-01), Swanson et al.
Optical Sciences Group, "Fresnel II", Sep. 1971, 24 Tiburon Street, San Rafael, Calif., 94901.

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