High resolution imagery systems and methods

Details High resolution imagery systems and methods High resolution imagery systems and methods

1990-05-08

1992-10-20

McCamish, Marion E.

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Making named article

430323, 430324, 430329, 430 22, G03C 500

Patent

active

051569434

ABSTRACT:
The current limits of resolution of multi-element optical systems are exceeded by reducing the number of elements while introducing at the critical aperture a blazed transmission grating having grating rings of low bending power defined by multiple plateaus. By illuminating the optical train with monochromatic light that constitutes a multiplicity of distributed sources having a substantial temporal coherence but spatial incoherence and by varying the slopes and widths of the grating rings, local phase delays are introduced that adjust aberrations in the optical system, providing an aligned composite wavefront. The system and method may be used for presenting an image, as for a wafer stepper, or for viewing an image, as in a microscope.

REFERENCES:
patent: 4637697 (1987-01-01), Freeman
patent: 4690880 (1987-09-01), Suzuki et al.
patent: 4895790 (1990-01-01), Swanson et al.

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