High-resolution, cryogenic, side-entry type specimen stage

Details High-resolution, cryogenic, side-entry type specimen stage High-resolution, cryogenic, side-entry type specimen stage

1978-05-17

1979-07-24

Dixon, Harold A.

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

250398, 250526, G01N 2300

Patent

active

041624017

ABSTRACT:
A high-resolution, cryogenic side-entry type specimen stage includes a copper block within which a specimen can be positioned in the electron beam of an electron microscope, one end of the copper block constituting a specimen heat exchanger, means for directing a flow of helium at cryogenic temperature into the heat exchanger, and electrical leads running from the specimen to the exterior of the microscope for four point D.C. electrical resistivity measurements.

REFERENCES:
"Specimin Holder--Microscope" by J. W. Sprys, Rev. Sci. Inst., vol. 46, No. 6, Jun. 1975, pp. 773, 774.

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