Radiant energy – Inspection of solids or liquids by charged particles
Patent
1987-02-02
1989-01-24
Anderson, Bruce C.
Radiant energy
Inspection of solids or liquids by charged particles
250423F, G01N 2300
Patent
active
048002747
ABSTRACT:
A high resolution atomic force microscope allows atomic level topographs of conducting and insulating surfaces. The microscope includes a pair of crossed wires mounted on a single piezoelectric tube which not only controls the x-, and y-, positions of the tip as it is scanned across a surface, but which also adjusts the force with which the tip presses against the sample. The amount of the deflection of the wires is detected as a tunneling current between the wires and another electrode.
REFERENCES:
patent: 4343993 (1982-08-01), Binnig et al.
patent: 4668865 (1987-05-01), Gimzewski et al.
Hansma et al., Scanning Tunneling Microscopy, Journal of Applied Physics, vol. 61, No. 2, Jan. 15, 1987.
Drake et al., Tunneling Microscope for Operation on Air or Fluids, Rev. Sci. Instrum. 57(3), Mar. 1986.
Germano, A Study of a Two Channel Cylindrical PZT Ceramic Transducer for Use in Stereo Phonograph Cartridges, IRE Transactions on Audio, Jul.-Aug. 1959.
Binnig et al., Rev. Sci. Instrum., 57(8), Aug. 1986, Single Tube Three-Dimensional Scanner for Scanning Tunneling Microscopy.
Binnig et al., Atomic Force Microscope, Physical Review Letters, 3, Mar. 1986.
Hansma Paul K.
Sonnenfeld Richard
Anderson Bruce C.
Guss Paul A.
The Regents of the University of California
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