High resistance polysilicon resistor for integrated circuits and

Details High resistance polysilicon resistor for integrated circuits and High resistance polysilicon resistor for integrated circuits and

1995-06-28

1996-12-24

Walberg, Teresa J.

Electrical resistors

With base extending along resistance element

Resistance element and base formed in layers

338308, 338204, 437918, 296101, H01C 1012

Patent

active

055876960

ABSTRACT:
A multi-layer polysilicon resistor and a method by which the multi-layer polysilicon resistor is formed. A minimum of two polysilicon layers is formed upon an insulating layer, the insulating layer in turn being formed upon a semiconductor substrate. The first polysilicon layer is formed to a first thickness at a first deposition temperature. The second polysilicon layer is formed directly upon the first polysilicon layer. The second polysilicon layer is formed to a second thickness at a second deposition temperature. The two deposition temperatures are in the range of about 450 degrees centigrade to about 620 degrees centigrade, and the difference in temperature between the first deposition temperature and the second deposition temperature is a minimum of 10 degrees centigrade.

REFERENCES:
patent: 3761786 (1973-09-01), Imaizumi et al.
patent: 3879236 (1975-04-01), Langdon
patent: 3947866 (1976-03-01), Stellrecht
patent: 3984822 (1976-10-01), Simko et al.
patent: 4178674 (1979-12-01), Liu et al.
patent: 4647900 (1987-03-01), Schelhorn et al.
patent: 4690728 (1987-09-01), Tsang et al.
patent: 4725810 (1988-02-01), Foroni et al.
patent: 5024972 (1991-06-01), DePinto et al.
patent: 5037766 (1991-08-01), Wang
patent: 5164338 (1992-11-01), Graeger et al.
patent: 5164699 (1992-11-01), Smith et al.
patent: 5200733 (1993-04-01), Davis et al.
patent: 5489547 (1996-02-01), Erdeljac et al.

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