High-radiance emitters with integral microlens

Details High-radiance emitters with integral microlens High-radiance emitters with integral microlens

1977-09-19

1981-07-21

Smith, Ronald H.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156648, 156654, 156656, 156662, 427 77, 357 17, 313498, 313499, 313110, H01L 21306

Patent

active

042796903

ABSTRACT:
This invention deals with the fabrication of radiation emitting diodes having a small diameter shaped integral microlens formed by etching. Initially an oxide layer is deposited on the backside of the processed slice; then a ring pattern is opened in the oxide. An etch is used to form a ring groove with a mesa in the center. The center oxide dot over the mesa is removed and the etching continued to round off the edges of the mesa and to form a smooth shaped structure. Various shapes and diameters may be achieved with different ring dimensions and with different etch times.

REFERENCES:
patent: 3443140 (1969-05-01), Ing
patent: 3512027 (1970-05-01), Kupsky
patent: 3703670 (1972-11-01), Kunz
patent: 3767493 (1973-10-01), Kump
patent: 3877052 (1975-04-01), Dixon
patent: 3954534 (1976-05-01), Scifres

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