High Q inductor realization for use in MMIC circuits

Semiconductor device manufacturing: process – Making passive device

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438142, 438197, H01L 2120

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active

06162697&

ABSTRACT:
Methods and structures are disclosed which realize high Q inductors to provide on-chip noise matching of microwave monolithic integrated circuits, such as low noise amplifiers and output matching networks for power amplifiers. High Q inductors, of typically 6nH, are devised by using the inductance of package leads, bondwires, electronic board trace wires and transmission lines and other components in various configurations. These and other components are serially connected starting from a chip pad, representing a circuit node, to a circuit input on a that electronic board.

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Jan Craninckx et al, "A1.8-GHz CMOS Low-Phase-Noise Voltage-Controlled Oscillator with Prescaler", IEEE Journal of Solid-State Circuits, vol. 30, No. 12, Dec. 1995, pp. 1474-1482.

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