High-purity TI complexes, methods for producing the same and BST

Details High-purity TI complexes, methods for producing the same and BST High-purity TI complexes, methods for producing the same and BST

1996-07-31

1998-06-16

Nazario-Gonzalez, Porfirio

Organic compounds -- part of the class 532-570 series

Organic compounds

Heavy metal containing

556 1, 501 1, 501138, C07F 728, C04B 3500, C04B 3546

Patent

active

057673020

ABSTRACT:
!.sub.2 and cis-Ti(O-t-Bu).sub.2 (DPM).sub.2, and BST film-forming liquid compositions comprising solutions of either of the two types of high-purity Ti complexes and Ba(DPM).sub.2 and/or Sr(DPM).sub.2 in organic solvents can be used to form BST films. Crystals of the former complex are produced by adding purified water to a solution of TiCl.sub.2 (DPM).sub.2 in an organic solution, adding an alkali chemical to the solution to adjust the pH to 6.0-8.0 to thereby produce turbidity, and separating the organic layer which is then washed with water and heated to reflux. Crystals of the latter complex is produced by adding HDPM to a solution of Ti(O-t-Bu).sub.4 in an organic solvent, and heating the solution to reflux.

REFERENCES:
patent: 5349073 (1994-09-01), Horn et al.
patent: 5654456 (1997-08-01), Scott et al.
patent: 5679815 (1997-10-01), Kirlin et al.
Jpn. J. Appl. Phys. vol 33 (1994) pp. 5129-5134, Part 1, No. 9B, Sep. 1994 "Step Coverage and Electrical Properties of (Ba,Sr)TiO.sub.3 Films Prepared by Liquid Source Chemical Vapor Deposition Using TiO(DPM).sub.2 ", Takaai Kawahara, Mikio Yamamuka, Tetsuro Makita, Jiro Naka, Akimasa Yuuki, Noboru Mikami and Kouichi Ono.

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