High purity bulk chemical delivery system

Details High purity bulk chemical delivery system High purity bulk chemical delivery system

1994-09-09

1996-07-30

Kwon, John T.

Drying and gas or vapor contact with solids

Process

With contacting of material treated with solid or liquid agent

34 92, 34404, 34559, 622383, F26B 300

Patent

active

055399983

ABSTRACT:
An apparatus and method are described for delivering hygroscopic, corrosive chemicals such as hydrogen chloride from a source such as a tube trailer to a use point such as a semiconductor fabrication tool minimizing infiltration of moisture, and entrainment of particulates, while still reducing moisture contents below 100 parts per billion and achieving appropriate pressure drops without two phase flow.

REFERENCES:
patent: 4532778 (1985-08-01), Clark et al.
patent: 4853148 (1989-08-01), Tom et al.
patent: 5137047 (1992-08-01), George
patent: 5148945 (1992-09-01), Geatz
patent: 5359787 (1994-11-01), Mostowy, Jr. et al.
Paul M. Bhadha and Everett R. Greene. "Joule-Thomson Expansion and Corrosion in HCl Systems." Solid State Technology Jul. 1992:S3-S7.

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