High pressure/vacuum isolation apparatus and method

Details High pressure/vacuum isolation apparatus and method High pressure/vacuum isolation apparatus and method

1998-03-10

2000-06-13

Michalsky, Gerald A.

Fluid handling

Systems

With flow control means for branched passages

137 14, 137861, F16K 2400

Patent

active

060736550

ABSTRACT:
A valve system is provided for operatively coupling a high pressure source to a processing chamber that selectively cycles between high pressure and vacuum. The valve system includes a branch passageway that selectively communicates a source of intermediate pressure to a main passageway that couples the high pressure source to the processing chamber. The source of intermediate pressure may comprise a vent, a pump, or a source of pressurized fluid, etc. An inventive valve for sealing between the intermediate pressure and the vacuum pressure is also provided. The inlet of the valve is operatively coupled to the high pressure source (via one or more valves) and the outlet of the valve is operatively coupled to the processing chamber (via one or more valves). The valve stem is in continuous fluid contact with the inlet and is configured for high pressure sealing, and the outlet is configured for low pressure sealing and preferably comprises a resilient sealing member.

REFERENCES:
patent: Re29679 (1978-06-01), Boitnott
patent: 4688757 (1987-08-01), Cook et al.
patent: 5226632 (1993-07-01), Tepman et al.
patent: 5343946 (1994-09-01), Morrill
patent: 5363872 (1994-11-01), Lorimer
patent: 5419532 (1995-05-01), Fan
patent: 5433238 (1995-07-01), Cannizzaro et al.

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