Electric heating – Heating devices – Combined with container – enclosure – or support for material...
Patent
1997-12-02
1999-11-23
Walberg, Teresa
Electric heating
Heating devices
Combined with container, enclosure, or support for material...
219390, 219411, A21B 100
Patent
active
059904534
ABSTRACT:
An improved processing chamber is provided that withstands numerous high pressure/high temperature processing cycles without heater breakage. The processing chamber contains a high conductivity, a high emissivity and/or a high transmissivity shield positioned in sufficient proximity to a heater to prohibit gas currents such as convection current loops from forming between the shield and the heater. The shield is preferably a thin anodized metal or a sapphire sheet.
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Das Ashok K.
Stevens Joe
Tsai Matt
Tzou Erich
Applied Materials Inc.
Fuqua Shawntina
Walberg Teresa
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