High power x-ray source with improved anode cooling

Details High power x-ray source with improved anode cooling High power x-ray source with improved anode cooling

1983-03-09

1985-06-04

Anderson, Bruce C.

X-ray or gamma ray systems or devices

Source

Electron tube

378200, 378143, 378144, G21K 500, H01J 3500

Patent

active

045219036

ABSTRACT:
In an x-ray source having a cathode emitting electron beams (15, 16) bombarding inner surfaces of an inverted conical anode target cooled by flowing water on its exterior, providing in place of the apex (14b) of the conical anode (34) a rearwardly facing upstream cylindrical extension (34b) which insures against apex tip burn-out by extending the cooling structure, area and mass to an upstream position to further dissipate heat energy flux generated by impingement of the electron beam. Portions functioning to effectively cool the anode target extend into non-beam illuminating regions of the target anode.

REFERENCES:
patent: 4238682 (1980-12-01), Vratny
patent: 4258262 (1981-03-01), Maldonado
patent: 4336476 (1982-06-01), Holland
patent: 4439870 (1984-03-01), Poulsen
patent: 4455504 (1984-06-01), Iversen
Maldonado et al., "X-ray Lithography Source Using a Stationary Solid Pd Target", Journal of Vacuum Science and Technology, 16 (6), Nov./Dec. 1979, pp. 1942-1945.

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