High-power, plasma-based, reactive species generator

Details High-power, plasma-based, reactive species generator High-power, plasma-based, reactive species generator

1997-06-27

1999-04-06

Pascal, Robert J.

Electric lamp and discharge devices: systems

Discharge device load with fluent material supply to the...

Plasma generating

31511121, 315112, 31323131, 313 17, H01J 724

Patent

active

058923284

ABSTRACT:
A plasma-based generator for use with a power source including a plasma tube having a hollow tube body in which a plasma is generated by the power source; a first support structure supporting a downstream end of the plasma tube; and a second support structure holding an upstream end of the plasma tube, the second support structure connected to the first support structure, the second support structure including an expansion joint which changes its length to accommodate a lengthening and a shortening of the plasma tube due to its thermal expansion and contraction when plasma processing is performed within the plasma tube.

REFERENCES:
patent: 2964679 (1960-12-01), Schneider et al.
patent: 3753144 (1973-08-01), Kearns et al.
patent: 4492620 (1985-01-01), Matsuo et al.
patent: 4654504 (1987-03-01), Sullivan et al.
patent: 4918031 (1990-04-01), Flamm et al.
patent: 4941915 (1990-07-01), Matsuoka et al.
patent: 5008593 (1991-04-01), Schlie et al.
patent: 5055741 (1991-10-01), Schlie
patent: 5124998 (1992-06-01), Arrigoni et al.
patent: 5235251 (1993-08-01), Schlie
patent: 5361016 (1994-11-01), Ohkawa et al.
Pande et al., "Plasma Enhanced Metal-Organic Chemical Vapor Deposition of Aluminum Oxide Dielectric Film For Device Applications," J. Appl. Pnys. 54:5436-5440 (1983).
Pande, et al., "A Novel Low-Temperature Method of SiO.sub.2 Film Deposition for Mosfet Applications," Journal of Electronic Materials, 13:593-602 (1984).

Affiliated with

Also associated with

Rating

High-power, plasma-based, reactive species generator does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with High-power, plasma-based, reactive species generator, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and High-power, plasma-based, reactive species generator will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1374296