High-power cathode system for producing multilayers

Details High-power cathode system for producing multilayers High-power cathode system for producing multilayers

1983-12-22

1984-12-18

Demers, Arthur P.

Chemistry: electrical and wave energy

Apparatus

Coating, forming or etching by sputtering

204192R, C23C 1500

Patent

active

044889569

ABSTRACT:
High-power cathode system for producing multilayers of different target materials on a substrate has at least two different target materials which abut one another at a boundary line in the field of a magnetic field generator thereof. The substrate is transported for coating across the boundary line, preferably perpendicularly.

REFERENCES:
patent: 3985635 (1976-10-01), Adam et al.
patent: 4169031 (1979-09-01), Brors
patent: 4170541 (1979-10-01), Lamont
patent: 4279216 (1981-07-01), Buhl
patent: 4397724 (1983-08-01), Moran
patent: 4434038 (1984-02-01), Morrison

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