Optical: systems and elements – Mirror – With support
Reexamination Certificate
2005-04-27
2009-10-20
Pritchett, Joshua L (Department: 2872)
Optical: systems and elements
Mirror
With support
Reexamination Certificate
active
07604359
ABSTRACT:
The present high positioning reproducible mirror-actuator interface disclosed herein overcomes the deficiencies associated with conventional interface systems and offer a number of advantages that are disclosed herein. Generally, the mirror mounts provide a reliable and robust interface between the mirrors and actuators, that serve to move and position the mirrors, as wells as providing an interface between the mirrors and gravity compensator pins. The mirror mount is characterized as having a body that has an outer peripheral wall that includes a plurality of flexible elements around the perimeter of the body, each having a high stiffness in plane and a high flexibility out of plane. The body is open at the first end to allow flexing of the flexible elements. The flexible elements providing a direct coupling interface between the mirror mount and the mirror. The flexible elements of the mirror mount provides a number of advantages and increases the performance capabilities of the first mechanical interface between the mirror mount and the actuator.
REFERENCES:
patent: 5862003 (1999-01-01), Saif et al.
patent: 2003/0010902 (2003-01-01), Hof et al.
patent: 2003/0058422 (2003-03-01), Loopstra et al.
patent: WO-98/13714 (1998-04-01), None
U.S. Appl. No. 10/704,534, Koomeef et al., related application.
Broers Sander C.
Soemers Herman
van Deuren Franciskus Hendrikus
Visser Hendrik Dirk
Carl Zeiss SMT AG
Darby & Darby P.C.
Pritchett Joshua L
LandOfFree
High positioning reproducible low torque mirror-actuator... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with High positioning reproducible low torque mirror-actuator..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and High positioning reproducible low torque mirror-actuator... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-4131248