High performance thermal interface curing process for...

Semiconductor device manufacturing: process – Packaging or treatment of packaged semiconductor – Metallic housing or support

Reexamination Certificate

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C438S106000, C438S112000, C438S118000, C219S678000, C219S690000, C219S759000, C257S675000, C257S706000, C257S719000, C257S796000

Reexamination Certificate

active

06982192

ABSTRACT:
An integrated circuit package which has a thermal epoxy that can be attached to an integrated circuit and a thermal element. The thermal epoxy can be cured with energy at a microwave frequency. Curing the thermal epoxy with microwave energy can minimize package warpage during the curing process.

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