High performance integrated inductor

Details High performance integrated inductor High performance integrated inductor

2007-11-13

2007-11-13

Vu, David (Department: 2818)

Semiconductor device manufacturing: process

Making device or circuit responsive to nonelectrical signal

Responsive to electromagnetic radiation

C257S531000

Reexamination Certificate

active

11137974

ABSTRACT:
Some embodiments of the present invention include providing high performance integrated inductors.

REFERENCES:
patent: 6815220 (2004-11-01), Crawford et al.
O'Donnell et al., “Mictotransformers and Inductors using Permalloy Thin Films”, PEI Technologies, Ireland. (retrieved from WWW May 25, 2005) 8 pages http://www.eimw.tuwien.ac.at/publication/workshop0600/ODonnell.html.
Chomnawang et al, “Surface micromachined arch-shape on-chip 3-D solenoid inductors for high-frequency applications”, JM vol. 2 No. 4, Oct. 2003, pp. 275-281.
Chomnawang et al, “On-chip dome-shape spiral micro-inductor for high-frequency applications”, Proceedings of SPIE vol. 4700, 2002, pp. 50-57.
Chomnawang et al, “On-chip 3D air core micro-inductor for high-frequency applications using deformation of sacrificial polymer”, Proceedings of SPIE vol. 4334, 2001.
Chomnawang et al, “Micromachined on-chip 3D inductors”, 4 pages; unknown date.
Crawford et al, “High-Frequency Microinductors with Aorphous Magnetic Ground Planes”, IEEE Transactions on Magnetics, vol. 38, No. 5 Sep. 2002.
Gardner et al, “High Frequency (GHz) and Low Resistance Integrated Inductors Using Magnetic Materials”, IEEE 0-7803-6678, 2001 pp. 101-103.

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