Radiant energy – Electron energy analysis
Patent
1987-06-19
1989-02-21
Anderson, Bruce C.
Radiant energy
Electron energy analysis
250309, H01J 4000, H01J 4700
Patent
active
048067547
ABSTRACT:
An energy analyzer for electrons comprises three spherically configured cylindrically symmetric members. An outer member is a hollow spherical section having a first inlet edge. A first inner member is a spherical portion disposed concentrically within the outer member with a defined space therebetween, and has a second inlet edge cooperative with the first inlet edge to form an inlet opening receptive of electrons from a conical lens. A second inner member is a spherical segment disposed concentrically within the outer member and has a second outlet edge cooperative with a first outlet edge of the first inner member to define an exit slot for egress of charged particles having selected trajectories in the defined space. A cylindrical detector is situated within the spherical members for detecting the egressed charged particles. The inlet opening and the exit slot are such that the angle subtended by the selected trajectories between the inlet opening and the exit slot is preferably between about 0.8.pi. and .pi. radians.
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Anderson Bruce C.
Grimes E. T.
Ingham H. S.
Masselle F. L.
The Perkin-Elmer Corporation
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