High fill ratio reflective spatial light modulator with...

Details High fill ratio reflective spatial light modulator with... High fill ratio reflective spatial light modulator with...

2006-01-31

2006-01-31

Mack, Ricky L. (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S291000, C359S295000

Reexamination Certificate

active

06992810

ABSTRACT:
A micro mirror array having a hidden hinge that is useful, for example, in a reflective spatial light modulator. In one embodiment, the micro mirror array includes spacer support walls, a hinge, a mirror plate and a reflective surface on the upper surface of the mirror plate, the reflective surface concealing the hinge and the mirror plate. The micro mirror array fabricated from a single material.

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