Radiant energy – Inspection of solids or liquids by charged particles
Patent
1985-01-16
1986-12-30
Anderson, Bruce C.
Radiant energy
Inspection of solids or liquids by charged particles
250307, 250309, 250423P, G01N 2300
Patent
active
046330844
ABSTRACT:
A method and apparatus are provided for trace and other quantitative analysis with high efficiency of a component in a sample, with the analysis involving the removal by ion or other bombardment of a small quantity of ion and neutral atom groups from the sample, the conversion of selected neutral atom groups to photoions by laser initiated resonance ionization spectroscopy, the selective deflection of the photoions for separation from original ion group emanating from the sample, and the detection of the photoions as a measure of the quantity of the component. In some embodiments, the original ion group is accelerated prior to the RIS step for separation purposes. Noise and other interference are reduced by shielding the detector from primary and secondary ions and deflecting the photoions sufficiently to avoid the primary and secondary ions.
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Gruen Dieter M.
Pellin Michael J.
Young Charles E.
Anderson Bruce C.
Higgins Michael J.
Hightower Judson R.
Lohff William
The United States of America as represented by the United States
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