High-deformation composite microresonator

Details High-deformation composite microresonator High-deformation composite microresonator

2005-06-29

2009-11-03

Dougherty, Thomas M (Department: 2837)

Electrical generator or motor structure

Non-dynamoelectric

Charge accumulating

C216S017000

Reexamination Certificate

active

07612484

ABSTRACT:
An electromechanical resonator including a vibrating body, at least one excitation electrode, and at least one detection electrode. The vibrating body includes a first part made of a first material with a first Young's modulus and a second part made of a second material with a second Young's modulus, less than the first Young's modulus, the second part being at least partially located facing the detection electrode.

REFERENCES:
patent: 6628177 (2003-09-01), Clark et al.
patent: 2002/0105393 (2002-08-01), Clark et al.
patent: 2003/0168929 (2003-09-01), Ma et al.
patent: 2005/0151442 (2005-07-01), Kihara et al.
patent: 2005/0206479 (2005-09-01), Nguyen et al.
patent: 2008/0150656 (2008-06-01), Hagelin et al.
patent: 2006-319387 (2006-11-01), None
Clark T.-C. Nguyen, “Micromechanical Circuits for Communication Transceivers”, IEEE BCTM 8.2, XP-10524193, Sep. 24, 2000, pp. 142-149.
Siavash Pourkamali, et al., “SOI-Based HF and VHF Single-Crystal Silicon Resonators With SUB-100 Nanometer Vertical Capacitive GAPS”, IEEE Transducers '03 The 12International Conference of Solid State Sensors, Actuators and Microsystems, Jun. 8-12, 2003, pp. 837-840.
Jing Wang, et al., “1.14-GHz Self-Aligned Vibrating Micromechanical Disk Resonator”, IEEE Radio Frequency Integrated Circuits Symposium, 2003, pp. 335-338.
Ville Kaajakari, et al., “Square-Extensional Mode Single-Crystal Silicon Micromechanical RF-resonator”, IEEE Transducers '03 The 12thInternational Conference on Solid State Sensors, Actuators and Microsystems, Jun. 8-12, 2003, pp. 951-954.
Mohamed A. Abdelmoneum, et al., “Stemless Wine-Glass-Mode Disk Micromechanical Resonators”, IEEE, 2003, pp. 698-701.

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