High-definition vertical-scan interferometry

Details High-definition vertical-scan interferometry High-definition vertical-scan interferometry

2006-06-23

2009-10-20

Lyons, Michael A (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

C356S497000

Reexamination Certificate

active

07605925

ABSTRACT:
A broadband interferometric vertical scan of a sample surface is performed to produce interference data in conventional manner. A coarse surface profile of the surface is obtained in real time using a conventional technique, such as a center-of-mass calculation. A fine surface map is obtained concurrently using a quadrature-demodulation algorithm applied in real time to the same interference data used for the coarse surface calculation. The fine surface map is then combined with the coarse surface profile using an unwrapping technique that produces a final surface map with sub-nanometer resolution within a large height range.

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Matthias Fleischer et al. , “Fast Algorithms for Data Reduction in Modern Optical Three-Dimensional Profile Measurement . . . ,” Applied Optics. vol. 39, No. 8, Mar. 2000.

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